Suzhou Enbroad Microsystem Technology Co., Ltd.
CN/EN
MEMS Flow Meter Chip

FS-001

The FS-001 flowmeter chip is a MEMS chip based on the thermal effect. There are two heating resistors and an ambient temperature resistor on each product
performance parameter Advantages and Characteristics application area

performance parameter


ModelHeating Resistor Resistance ValueEnvironmental Resistance ValueAmbient TemperatureMaximum Temperature of Heating ResistorTemperature Coefficient of ResistanceResponse Time
FS-00145±5Ω1700±400Ω-40~125℃环境温度＋100℃6000±500ppm10ms







Advantages and Characteristics

  • Excellent long-term stability
    Excellent long-term stability Excellent long-term stability
  • MS level fast response
    MS level fast response MS level fast response
  • Miniaturization MEMS technology
    Miniaturization MEMS technology Miniaturization MEMS technology

application area

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